THE DETERMINATION OF TWO MATERIALS INTERFACE COURSE USING RTG DIFFRACTION

M. Malá,

KFY FAV ZČU, Plzeň, Czech Republic

Thickness of a layer on a substrate is often not constant but it varies. When the changes of thickness are not too steep then for determination of layer thickness or interface course it can be of advantage to use rtg. diffraction (the layer thickness should not overstep the penetration depth of used radiation). After evaluation of several diffractograms taken at different places of the sample surface lying e.g. on the same straight line one can determine a curve describing course of interface of both materials from mutual longitudinal positions of measuring poits and changes of intensity ratios of peaks of layer and substrate. Having the curve it is possible to estimate the layer thickness in any place lying on the line. This principle is of course possible to use for determination of not only 1-dimensional interface course but 2-dimensional too.